By H. S. Shriram, et al.
RF MEMS devices are designed to help overcome the problem of high losses associated with semiconductors at high frequencies. Tunable MEMS capacitors are micro-meter-scale electronic devices that are controlled through different actuation mechanisms, including electrostatic or electro-thermal actuators, depending on the functional complexity. This white paper proposes a design for an electro-thermally actuated tunable MEMS capacitor suitable for filters, oscillators, phase shifters and impedance matching networks. Download the full paper for more information, including how the design utilizes bimetallic strip actuators instead of conventional asymmetric arm actuators, and how the model simulation indicates the capacitance can be varied up to a tenth of its initial value.