MTT-S 2007: Cascade Microtech Announces Power Semiconductor Device Characterization System

Honolulu -- IEEE MTT-S International Microwave Symposium -- Cascade Microtech announced its new Tesla power device characterization system. Tesla, unlike any other probing system, solves the on-wafer probing challenges for engineers and test technicians who need to characterize their power devices. The power semiconductor market is projected to grow from $25.8B in 2007 to $34.2B in 2009 fueled by the use of power devices in everything from industrial products to consumer electronics. The broad use of power semiconductors has created a pressing need to characterize devices quickly and efficiently. Design engineers and test technicians are under pressure to speed up the time-to-market for new power devices. Cascade Microtech designed Tesla, the company's first power device measurement system providing a complete on-wafer solution for over temperature, low contact resistance measurements of power semiconductors up to 60A and 3000V.

"The Tesla power device measurement system will reduce costs by eliminating the hassles of packaging devices before we characterize them," said Edouard de Fresart, Power Device Section Manager, SMARTMOS Technology Center, Freescale Semiconductor. "It will have a huge effect on our productivity by reducing the wasted time and steps we incur in packaging while still providing accurate test data."

Power semiconductors in demand worldwide according to Yole Développement PowerD-06 report "Worldwide demand for power semiconductors is growing due to the double-digit demand for more efficient power utilization," said Philippe Roussel, project manager, Power Electronics, Yole Développement, Lyon, France.

Power devices such as MOSFETs (metal oxide semiconductor field-effect transistor), bipolar junction transistors (BJT), rectifiers, thyristors, and insulated gate bipolar transistors (IGBT) are widely used in cell phone infrastructures, laptop computers, alternative energy vehicles, home appliances, electric trains and more. Power devices are characterized by their ability to accommodate higher current density, higher power dissipation and/or higher reverse breakdown voltage.

Cascade Microtech's Tesla system features two new wafer probes, including a high current probe that reduces the potential for probe and device destruction during testing. The probe can support 10A of current in continuous mode and up to 60A of current in pulsed mode. To reduce device heating, the probe tip is designed to minimize contact resistance at the wafer-to-probe interface.

The Tesla system also features a high voltage probe that ensures a high performance electrical measurement path at high voltages. The high voltage probe provides the capability to make coaxial measurements up to 3000V and triaxial measurements up to 1100V. In addition, both the high current and the high voltage probes feature a replaceable tip.

The Tesla system's wafer chuck provides state-of-the-art handling for thin wafers. An exclusive chuck top technology provides the right amount of vacuum in a delicate method that protects against wafer breakage and probe damage, all while ensuring a minimal contact resistance.

Other safety features of the Tesla system include the highly insulated and electrically shielded cable assemblies that provide both triaxial performance and high current/high voltage handling capabilities. Tesla also offers a safety interlock system and remote system operation. The measurement environment and every component in the measurement path is designed and tested by Cascade Microtech to comply with voltages up to 3000V.

Tesla is a turnkey, scaleable system. It is optimized for ease of purchase and configuration to create a safe testing environment for power semiconductor devices. Tesla includes Cascade Microtech's wafer probe station and probes and proprietary safety components.

SOURCE: Cascade Microtech, Inc.