Micromanipulator Introduces 300mm Manual Probe Station

Carson City, NV -- The Micromanipulator Company introduced its 2nd generation model 9020 300mm manual probe station. The model 9020 probe station features motorized drives with inter-active manual control of the probe station stage, theta, platen, and microscope via joystick or Micromanipulator's exclusive MicroTouch controls. Motorized drive allows for placement of the station stage and microscope controls, negating the requirement to reach across the station's large platen and 300 mm stage drive.

Featuring a re-designed version of Micromanipulator's RMC motorized control system the 9020 probe station provides a wide dynamic speed range combining a high resolution/low speed setting capable of use for sub-micron geometry probing and a high speed setting which allows rapid movement from one side of the wafer to the other. The controller features a X-Y-Theta control mode for wafer alignment, a Z lockout setting to avoid accidental platen Z movements during X-Y moves, and a full X-Y-Z-Theta lock out mode to avoid movement due to inadvertent bumps during testing.

The 9020's open design allows for ease of complex setups. The station features a massive base, stage support and 4-point platen drive for stability and precision. The station is low current ready and low temperature ready. It can be ordered with plumbing options to support all popular hot / cold thermal chucks. The 9020 supports all standard 200 and 300 mm probing accessories.

The 9020 is suited for failure analysis, device characterization, process characterization, and wafer level reliability (WLR) work. It supports DC passive and active probes, RF and microwave probes and manipulators, standard and multi-site probe cards, and manipulator mounted multi-site cards (like Celadon's Versa-Tile cards) mounted on Micromanipulator's WAVE (WLR and Microwave) manipulator system.

The 9020 probe station is available now.

SOURCE: The Micromanipulator Company