Combining On-Wafer VNA And Spectrum Analyzer Measurements

Performing on-wafer measurements presents a unique set of challenges. Achieving accurate on-wafer measurements requires careful planning of installation, calibration, and measurement configuration. Often, multiple parameters must be included in the overall analysis. This application note describes how S-parameters and spectrum analysis can be monitored simultaneously from 70 kHz to 110 GHz using a combination of the VectorStar ME7838A broadband system, the Spectrum Master MS2760A ultraportable spectrum analyzer, and the Anritsu MN25110A W1 coaxial precision directional coupler.