News | April 12, 2005

Cascade Microtech Introduces PureLine Technology For Noise Sensitive Devices, Tests

Source: Cascade Microtech, Inc.

Beaverton, OR -- Cascade Microtech, Inc. today announced PureLine technology, which ensures low electrical intrusion for noise sensitive devices and tests. PureLine offers advanced capability on 200 mm and 300 mm on-wafer probing systems. (Click here to download the product datasheet.)

In order to increase device speed and reduce cost, semiconductor manufacturers have continued to aggressively scale their devices, while moving to new materials and larger 300 mm wafers. As a result, the International Test Roadmap for Semiconductors (ITRS) shows continuing momentum towards lower operating voltages. From a test standpoint, this means lower applied stress voltages in time dependent dielectric breakdown (TDDB) measurements, lower stimulus levels for capacitance, and smaller voltage steps for IV curves.

"With consumer electronic products requiring higher performance and longer battery life, IC operating voltages will be dramatically reduced to 0.7 Volts and MOS thresholds will fall to 0.14 Volts. At these levels multi-frequency background transmissions can obscure critical measurement data," John Pence, VP, engineering products division, said. "Cascade's new 200 mm and 300 mm wafer probing systems with PureLine technology offer our customers the breakthrough electrical noise immunity to test existing and future noise sensitive devices."

This patented technology ensures high immunity from conducted, radiated, and internal noise and has the following system benefits:

Application

Requirement

PureLine Advantage 

Time Dependent Dielectric Breakdown

Precise control of lower stress voltages

Reduces noise component on the applied voltage

MOS DC characterization

Accurate threshold voltage measurements

Unperturbed measurements even with lower gate voltage steps

1/f  flicker noise test

Background radiated noise  must be low

Low conducted and generated emissions

MOS CV Capacitance

Short and load calibrations at lower AC stimulus levels

Short and Load cal even at 5 mV

PureLine supports a broad range of on-wafer test processes, from process development through characterization and modeling to long-term reliability and failure analysis test. PureLine is available now.

Source: Cascade Microtech