Nanofabrication Process ServicesSource: NTT Advanced Technology Corporation
NTT Advanced Technology provides nanofabrication process services from many kinds of spot service to whole process service for device production.
- Fabrication of R&D prototype devices using semiconductors (GaN, Si, GaAs, InP, etc.)
- All kinds of spot service such as film deposition, patterning, processing, polishing, and dicing
- Evaluations of surface characteristics, electrical properties, etc.
- Consulting services on troubles in fabrication process
- Fabrication of device prototypes for MEMS elements using Si processing and plating
- Device sealant, interlayer insulating film formation
Specific Nanofabrication Process Services
EB Lithography (Electron Beam Lithography)
Resist Patterning (Photo-Lithography)
Etching (Dry Etching, Wet Etching, Ion Beam Etching)
Thin Film Fabrication and Mask Design
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•Datasheet: Nanofabrication Process Services
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